Advanced broadband monitoring for thin film deposition through equivalent optical admittance loci observation
نویسندگان
چکیده
منابع مشابه
High-resolution photometric optical monitoring for thin-film deposition.
Real-time monitoring of thin-film deposition with high resolution is important for precise fabrication of thin-film devices in a technological environment with ever-increasing demands for smaller size and better performance. Using photometry, we were able to achieve a real-time optical monitoring resolution of film thickness that is comparable with a single atomic layer scale (i.e., subnanomete...
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Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this method are highly charged to a fraction of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10’s nanometres, and the charge and size of the droplets can be controlled to some extent be electrical means. Motion of the charged droplets ...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2012
ISSN: 1094-4087
DOI: 10.1364/oe.20.003883